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Microsystem Technology and Microrobotics (Microsystem Technology & Microrobotics)
Sergej Fatikow , and Ulrich Rembold Manufacturer: Springer ProductGroup: Book Binding: Hardcover ASIN: 3540606580 |
Book Description
Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.Customer Reviews:
excellent resource for overlooking capabilites of tech........1999-05-30
No math, but a lot of good illustrations and concepts.
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Microrobotics & Microsystem Fabrication: 16-17 October 1997 Pittsburgh, Pennsylvania (Proceedings of Spie, Vol. 3202)
Manufacturer: SPIE-International Society for Optical Engine ProductGroup: Book Binding: Paperback ASIN: 0819426342 |
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Microsystem Technology and Microrobotics
S./ Rembold, U./ Rembold, Ulric Fatikow Manufacturer: Springer Verlag 01/1//1997 ProductGroup: Book Binding: Paperback ASIN: B000N5PXB8 |
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